Influence of nanoparticle formation on discharge properties in argon-acetylene capacitively coupled radio frequency plasmas
Author:
Affiliation:
1. Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany
2. Technical Faculty, University of Kiel, Kaiserstr. 2, 24143 Kiel, Germany
3. IEAP, University of Kiel, Leibnizstr. 11-19, 24118 Kiel, Germany
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4941806
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