Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3327513
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1. Fabrication of 3 nm wires using 100 keV electron beam lithography and poly(methyl methacrylate) resist
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