Effect of Pulse Interval on TSV Process using a Picosecond Laser
Author:
Publisher
Japan Laser Processing Society
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Instrumentation
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Simulation study and parameter optimization of laser TSV using artificial neural networks;Journal of Materials Research and Technology;2023-07
2. High Pulse Repetition Frequency Micro Hole Drilling of Silicon Using Ultrashort Pulse Laser Radiation;Journal of Laser Micro/Nanoengineering;2019-12
3. Comparison of bending fracture strength of silicon after ablation with nanosecond and picosecond lasers;The International Journal of Advanced Manufacturing Technology;2015-09-24
4. Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality;Applied Physics A;2015-07-23
5. Improving the dielectric breakdown field of silicon light-emitting-diode sub-mount by a hybrid nanosecond laser drilling strategy;Microelectronics Reliability;2013-03
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