Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology-Reference-Cited by-同舟云学术

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Interfacial Adhesion between Rough Surfaces of Polycrystalline Silicon and Its Implications for M/NEMS Technology

Published:2010-01 Issue:15-16 Volume:24 Page:2545-2556
ISSN:0169-4243
Container-title:Journal of Adhesion Science and Technology
language:en
Short-container-title:Journal of Adhesion Science and Technology

Author:

Laboriante Ian,Bush Brian,Lee Donovan,Liu Fang,Liu Tsu-Jae King,Carraro Carlo,Maboudian Roya

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,General Chemistry

Link

http://www.tandfonline.com/doi/pdf/10.1080/10256018808623883

Reference44 articles.

1. Critical Review: Adhesion in surface micromechanical structures

2. SURFACE CHEMISTRY AND TRIBOLOGY OF MEMS

3. An investigation of sidewall adhesion in MEMS

4. Surface processes in MEMS technology

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigations of the Adhesive Contact Behavior of Elastic Layered Media With Surface Roughness;Journal of Tribology;2019-02-05

2. Adhesive Force Characterization for MEM Logic Relays With Sub-Micron Contacting Regions;Journal of Microelectromechanical Systems;2014-02

3. Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating;Sensors and Actuators A: Physical;2013-04

4. Friction measurement on free standing plates using atomic force microscopy;Review of Scientific Instruments;2013-01

5. Adhesion of Colloidal Particles on Modified Electrodes;Langmuir;2012-11-15

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