Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

Author:

Kaneta Ren, ,Hasegawa Takumi,Kido Jun,Abe Takashi,Sohgawa Masayuki

Abstract

We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

Funder

Japan Society for the Promotion of Science

Japan Science and Technology Agency

Publisher

Fuji Technology Press Ltd.

Subject

Electrical and Electronic Engineering,General Computer Science

Reference24 articles.

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