Study on the SUAM Double Magnet System for Polishing

Author:

Nakasaki Tatsuya, ,Kinoshita Yushi,Khajornrungruang Panart,Otabe Edmund Soji,Suzuki Keisuke

Abstract

Superconductive assisted machining (SUAM) is a novel machining method that eliminates tool interference via magnetic levitation tools. In our study, we developed a double magnet system (DMS) to increase the maximum power of the holding force and stabilize the magnetic rotation during polishing via the higher magnetic flux compared to a single magnet system (SMS). The maximum magnetic flux density of the DMS was approximately 100 mT higher than that of the SMS. In these cases, the entire holding force increases as the distance between the superconducting bulk and lower magnet decreases. The attractive forces are maximum around a displacement of 6 mm, although the repulsive and restoring forces increase spontaneously. The polishing performances of the DMS on the SUS304 and A1100P plates were evaluated using water-based diamond slurries, for equal levitation amounts. The amount removed by the DMS increased for the A1100P and SUS304 substrates compared to that by the SMS. In this case, we observe that the deviation of the polishing area on the DMS decreases compared to that of the SMS, reflecting a more stable rotation and movement due to the higher holding force.

Funder

Japan Society for the Promotion of Science

Publisher

Fuji Technology Press Ltd.

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

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1. Study on sonic-assisted processing method for micro pattern formation on Cu film;2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON);2024-02-16

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