Development of Micro Probe System for Micro Measurement Center

Abstract

We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center plate. Optical sensors measure ball movement, which is synchronized with the contact probe. Basic experiments confirmed that the new probe has a measurement resolution of 50 nm.