Measurement of a Freeform Surface by Dragging Three Point Method Along with a Circular Path
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Published:2024-01-05
Issue:1
Volume:18
Page:66-76
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ISSN:1883-8022
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Container-title:International Journal of Automation Technology
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language:en
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Short-container-title:IJAT
Author:
Tokuchi Kento1, Kurita Mikio12, Takahashi Keisuke2
Affiliation:
1. Department of Astronomy, Faculty of Science, Kyoto University, Kitashirakawa-Oiwake-cho, Sakyo-ku, Kyoto, Kyoto 606-8502, Japan 2. LogistLab Inc., Tokyo, Japan
Abstract
Freeform surfaces can realize optical systems with a wide field of view, high throughput, and high contrast. For constructing optical systems with freeform surfaces, measuring technology is essential. However, it is difficult to measure freeform surfaces by existing measurement methods. We have developed a new measurement method of the dragging three-point method (DTPM). To realize further improvement in the accuracy of the DTPM, we propose the DTPM with a circular path. Since the circular path is closed, the measurement error can be reduced by the boundary condition that the height and slope agree with at the start and end points of the measurement. To evaluate this method, we conducted the circular path measurement of an off-axis asphere. The measurement repeatability was RMS = 1.5 nm, and the result agreed well with that of an interferometric test; the difference was RMS = 17.2 nm.
Funder
Ministry of Economy, Trade and Industry
Publisher
Fuji Technology Press Ltd.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
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