Current Status and Application of Micro-electromechanical Systems (MEMS)

Abstract

MEMS (Micro-electromechanical systems), a technology that produces devices with tiny size and various abilities, has shown its great potential in many areas, but there are still many parts that wait to be improved. This paper would give a brief introduction of the technology with its features, superiorities and drawbacks. Based on these characteristics, several applications of the technology would be introduced with some specific examples. In this paper, current status with the advantages and disadvantages of MEMS would be discussed, and some improvements would be mentioned related to the problems that has been recently discovered in order to make the best use of the benefits and bypass the drawbacks. Next, applications of MEMS would be introduced and exemplified with the principle of how MEMS woks in specific areas. In the prospects and discussion part, several expectations would be predicted based on the current situation and some essays, which would also be analyzed. Finally, the part of conclusion would summarize the parts that have done as well as the opinion of future development of MEMS.