Author:
Yeh Mu-Shih,Wu Yung-Chun,Hung Min-Feng,Liu Kuan-Cheng,Jhan Yi-Ruei,Chen Lun-Chun,Chang Chun-Yen
Abstract
Abstract
This study proposed the twin poly-Si fin field-effect transistor (FinFET) nonvolatile memory with a structure that is composed of Ω-gate nanowires (NWs). Experimental results show that the NW device has superior memory characteristics because its Ω-gate structure provides a large memory window and high program/erase efficiency. With respect to endurance and retention, the memory window can be maintained at 3.5 V after 104 program and erase cycles, and after 10 years, the charge is 47.7% of its initial value. This investigation explores its feasibility in the future active matrix liquid crystal display system-on-panel and three-dimensional stacked flash memory applications.
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Su CJ, Tsai TI, Lin HC, Huang TS, Chao TY: Low-temperature poly-Si nanowire junctionless devices with gate-all-around TiN/Al2O3 stack structure using an implant-free technique. Nanoscale Res Lett 2012, 7: 339. 10.1186/1556-276X-7-339
2. Su CJ, Su TK, Tsai TI, Lin HC, Huang TY: A junctionless SONOS nonvolatile memory device constructed with in situ-doped polycrystalline silicon nanowires. Nanoscale Res Lett 2012, 7: 162. 10.1186/1556-276X-7-162
3. Park KT, Choi J, Sel J, Kim V, Kang C, Shin Y, Roh U, Park J, Lee JS, Sim J, Jeon S, Lee C, Kim K: A 64-cell NAND flash memory with asymmetric S/D structure for sub-40nm technology and beyond. VLSI Tech Dig 2006, 2006: 19.
4. Young ND, Harkin G, Bunn RM, MaCulloch DJ, French ID: The fabrication and characterization of EEPROM arrays on glass using a low-temperature poly-Si TFT process. IEEE Trans Electron Device 1930, 1996: 43.
5. Hung MF, Wu YC, Tsai TM, Chen JH, Jhan YR: Enhancement of two-bit performance of dual-pi-gate charge trapping layer flash memory. Applied Physics Express 2012, 5: 121801. 10.1143/APEX.5.121801
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