Author:
Cha Jeong Ok,Nam Tae Hyun,Alghusun Mohammad,Ahn Jeung Sun
Abstract
Abstract
TiNi shape memory alloy thin films were deposited using the pulsed laser deposition under vacuum and in an ambient Ar gas. Our main purpose is to investigate the influences of ambient Ar gas on the composition and the crystallization temperature of TiNi thin films. The deposited films were characterized by energy-dispersive X-ray spectrometry, a surface profiler, and X-ray diffraction at room temperature. In the case of TiNi thin films deposited in an ambient Ar gas, the compositions of the films were found to be very close to the composition of target when the substrate was placed at the shock front. The in-situ crystallization temperature (ca. 400°C) of the TiNi film prepared at the shock front in an ambient Ar gas was found to be lowered by ca. 100°C in comparison with that of a TiNi film prepared under vacuum.
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Reference25 articles.
1. Wei ZG, Sandstorm R, Miyazaki S: Shape memory materials and hybrid composites for smart systems. Part II. Shape-memory hybrid composites. J Mater Sci 1998, 33: 3763. 10.1023/A:1004674630156
2. Miyazaki S, Ishida A: Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films. Mater Sci Eng A 1999, 106: 273–275.
3. Xu D, Wang L, Ding G, Zhou Y, Yu A, Cai B: Characteristics and fabrication of NiTi/Si diaphragm micropump. Sens Actuators A Phys 2001, 93: 87. 10.1016/S0924-4247(01)00628-8
4. Gill JJ, Chang DT, Momoda LA, Carman GP: Manufacturing issues of thin film NiTi microwrapper. Sens Actuators A Phys 2001, 93: 148. 10.1016/S0924-4247(01)00646-X
5. Gupta V, Martynov V, Johnson AD: Recent developments in SMA thin film based microactuators for biomedical and fiber optics applications. Actuator 2002, 2002: 355.
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