Author:
Chang Joe-Ming,Chang Wei-Yu,Chen Fu-Rong,Tseng Fan-Gang
Abstract
Abstract
A single 210-nm Teflon nanoparticle (sTNP) was attached to the vertex of a silicon nitride (Si3N4) atomic force microscope tip and charged via contact electrification. The charged sTNP can then be considered a point charge and used to measure the electrostatic field adjacent to a parallel plate condenser using 30-nm gold/20-nm titanium as electrodes. This technique can provide a measurement resolution of 250/100 nm along the X- and Z-axes, and the minimum electrostatic force can be measured within 50 pN.
PACS
07.79.Lh, 81.16.-c, 84.37. + q
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
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