Sidewall lithography of micron-sized features in high-aspect-ratio meso-scale channels using a three-dimensional assembled mask
Author:
Publisher
Springer Science and Business Media LLC
Subject
Biomedical Engineering,Biomaterials
Link
http://link.springer.com/content/pdf/10.1186/s40486-014-0006-7.pdf
Reference6 articles.
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3. Rajaraman S, Choi SO, Shafer RH, Ross JD, Vukasinovic J, Choi Y, DeWeerth SP, Glezer A, Allen MG (2007) Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array. J Micromech Microeng 17(1):163–71
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