Author:
Tan Xianhua,Shi Tielin,Lin Jianbin,Sun Bo,Tang Zirong,Liao Guanglan
Funder
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Reference31 articles.
1. Wang CL, Jia GY, Taherabadi LH, Madou MJ (2005) A novel method for the fabrication of high-aspect ratio C-MEMS structures. J Microelectromech S 14(2):348–358
2. Long H, Xi S, Liu D, Shi T, Xia Q, Liu S, Tang Z (2012) Tailoring diffraction-induced light distribution toward controllable fabrication of suspended C-MEMS. Opt Express 20(15):17126
3. Lee JA, Lee S, Lee K, Il Park S, Lee SS (2008) Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis. J Micromech Microeng 18:0350123
4. Xi S, Shi T, Long H, Xu L, Tang Z (2015) Suspended integration of pyrolytic carbon membrane on C-MEMS. Microsyst Technol 21(9):1835–1841
5. Shilpa DSK, Afzal MAF, Srivastava S, Patil S, Sharma A (2016) Enhanced electrical conductivity of suspended carbon nanofibers: effect of hollow structure and improved graphitization. Carbon 108:135–145
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