Inelastic Scattering Cross Section of Si Determined from Angular Dependent Reflection Electron Energy Loss Spectra
Author:
Affiliation:
1. Advanced surface chemical analysis group, National Institute for Materials Science
2. Department of Physics and Chemistry, University of Southern Denmark
Publisher
Surface Analysis Society of Japan
Link
https://www.jstage.jst.go.jp/article/jsa/15/3/15_321/_pdf
Reference14 articles.
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3. [3] S. Hajati, O. Romanyuk, J. Zemek and S. Tougaard, Phys. Rev. B 77, 155403 (2008) ibid. B 77, 249904 (2008).
4. [4] R. F. Egerton, Electron Energy-loss Spectroscopy in the Electron Microscopy, 2nd. ed. Plenum, NewYork (1996).
5. [5] H. Jin, S. K. Oh, H. J. Kang and M.-H. Cho, Appl. Phys. Lett. 89, 122901 (2006).
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