Kinetics and concentration of active particles in nonequilibrium low temperature methane plasma
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Published:2014-05
Issue:3
Volume:52
Page:348-354
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ISSN:0018-151X
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Container-title:High Temperature
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language:en
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Short-container-title:High Temp
Author:
Semenova O. A.,Efremov A. M.,Barinov S. M.,Svettsov V. I.
Publisher
Pleiades Publishing Ltd
Subject
General Engineering,Condensed Matter Physics
Reference32 articles.
1. Eddy, C.R., Leonhardt, D., Douglass, S.R., Shamamian, V.A., Thoms, B.D., and Buler, J.E., J. Vac. Sci. Technol., A, 1999, vol. 17, no. 3, p. 780. 2. Kim, H.K., Lin, H., and Ra, Y., J. Vac. Sci. Technol., A, 2004, vol. 22, no. 3, p. 598. 3. Lim, W., Voss, L., Khanna, R., Gila, B.P., Norton, D.P., Pearton, S.J., and Ren, F., Appl. Surf. Sci., 2006, vol. 253, p. 1269. 4. Hyun Cho, Vartuli, C.B., Donovan, S.M., Abernathy, C.R., Pearton, S.J., Shul, R.J., and Constantine, C., J. Vac. Sci. Technol., A, 1998, vol. 16, no. 3, p. 1631. 5. Gottardi, G., Laidani, N., Bartali, R., Micheli, V., and Anderle, M., Thin Solid Films, 2008, vol. 516, p. 3910.
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