The Importance of Taking into Account the Heterogeneous Recombination of Atoms when Studying the Kinetics of Copper Etching in Chlorine Plasma
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Published:2022-12
Issue:S2
Volume:60
Page:S146-S152
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ISSN:0018-151X
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Container-title:High Temperature
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language:en
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Short-container-title:High Temp
Author:
Sitanov D. V.,Pivovarenok S. A.,Murin D. B.
Publisher
Pleiades Publishing Ltd
Subject
General Engineering,Condensed Matter Physics
Reference15 articles.
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