Author:
Efremov A.M.,Svettsov V.I.,Sitanov D.V.,Balashov D.I.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. Industrial plasma engineering;Rooth,1995
2. Applications of plasma processes to VLSI technology;Sugano,1990
3. Glow Discharge Processes: Sputtering and Plasma Etching;Chapman,1980
4. Monte Carlo-fluid model of chlorine atom production in Cl2, HCl, and CCl4 radio-frequency discharges for plasma etching
5. Principles of plasma discharges and materials processing;Lieberman,1994
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