Specificities of Electromagnetic Field Excitation in a Capacitive HF Discharge. III. Symmetric Discharge Partially Filling the Discharge Chamber-Reference-Cited by-同舟云学术

Specificities of Electromagnetic Field Excitation in a Capacitive HF Discharge. III. Symmetric Discharge Partially Filling the Discharge Chamber

Published:2021-03 Issue:3 Volume:47 Page:211-234
ISSN:1063-780X
Container-title:Plasma Physics Reports
language:en
Short-container-title:Plasma Phys. Rep.

Author:

Dvinin S. A.,Sinkevich O. A.,Kodirzoda Z. A.,Solikhov D. K.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous),Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1134/S1063780X2102001X.pdf

Reference41 articles.

1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005).

2. J. Perrin, J. Schmitt, C. Hollenstein, A. Howling, and L. Sansonnens, Plasma Phys. Control. Fusion 42, B353 (2000).

3. J. P. M. Schmitt, M. Elyaakoubi, and L. Sansonnens, Plasma Sources Sci. Technol. 11, A206 (2002).

4. A. E. Park, B. U. Cho, and J. K. Lee, IEEE Trans. Plasma Sci. 31, 628 (2003).

5. S. Samukawa, M. Hori, S. Raul, K. Tachibana, P. Bruggeman, G. Kroesen, J. C. Whitehead, A. B. Mur-phy, A. F. Gutsol, S. Starikovskaia, U. Kortshagen, J.‑P. Boeuf, T. J. Sommerer, M. J. Kushner, U. Czarnetzki, et al., J. Phys. D: Appl. Phys. 45, 253001 (2012).

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