Nanoparticle Formation in Zn+ and O+ Ion Sequentially Implanted SiO2 Film

Author:

Privezentsev V. V.,Makunin A. V.,Batrakov A. A.,Ksenich S. V.,Goryachev A. V.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

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3. C. Jiang, X. Sun, G. Lo, et al., Appl. Phys. Lett. 90, 263501 (2007).

4. C. Li, Y. Yang, X. Sun, et al., Nanotechnology 18, 135604 (2007).

5. S. Chu, M. Olmedo, Zh. Yang, et al., Appl. Phys. Lett. 93, 181106 (2008).

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2. Formation of Zn-Containing Clusters in Implanted Si<sub>3</sub>N<sub>4</sub> Film;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-11-01

3. Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-04

4. Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-03-01

5. Study of a Near-Surface Quartz Layer Sequentially Implanted with Zinc and Fluorine;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2021-07

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