Affiliation:
1. Scientific Research Institute for System Analysis RAS
2. Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
3. Osipyan Institute of Solid State Physics RAS
Abstract
The results of the synthesis of nanoclusters of metallic zinc and its oxide in crystalline quartz implanted with 64Zn+ ions with a dose of 5 × 1016 cm–2 and energy of 40 keV and annealed in an oxygen atmosphere in the temperature range 400–900°C are presented. Scanning electron microscopy combined with energy-dispersive spectroscopy, as well as Auger electron spectroscopy and photoluminescence, were used for the study. After implantation, separate nanoclusters of metallic zinc with a size of less than 1 µm were fixed on the surface and in the near-surface layer of quartz. It was established that, during annealing, the sample underwent a transition from the phase of metallic Zn to the phases of its oxide ZnO and silicate Zn2SiO4. After annealing at 700°C, which is the most optimal for obtaining the ZnO phase, zinc oxide nanoclusters smaller than 500 nm in size were formed in the near-surface layer of quartz. A peak in the form of a doublet at a wavelength of 370 nm was observed in the photoluminescence spectrum due to exciton luminescence in zinc oxide. After annealing at 800°C, the ZnO phase degraded and the zinc silicate phase Zn2SiO4 was formed.
Publisher
The Russian Academy of Sciences
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