Thermodynamic Study of (Hexafluoroacetylacetonato)(cyclooctadiene-1,5)copper As the Technological Basis for the Development of Chemical Vapor Deposition of Metal-Containing Film Heterostructures-Reference-Cited by-同舟云学术

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Thermodynamic Study of (Hexafluoroacetylacetonato)(cyclooctadiene-1,5)copper As the Technological Basis for the Development of Chemical Vapor Deposition of Metal-Containing Film Heterostructures

Published:2024-01 Issue:1 Volume:98 Page:57-62
ISSN:0036-0244
Container-title:Russian Journal of Physical Chemistry A
language:en
Short-container-title:Russ. J. Phys. Chem.

Author:

Zherikova K. V.,Trubin S. V.,Pishchur D. P.,Morozova N. B.

Publisher

Pleiades Publishing Ltd

Link

https://link.springer.com/content/pdf/10.1134/S0036024424010321.pdf

Reference25 articles.

1. K. I. Karakovskaya, S. I. Dorovskikh, E. S. Vikulova, et al., Coatings 11, 78 (2021). https://doi.org/10.3390/coatings11010078

2. D. Hnyk, M. Bühl, P. T. Brain, et al., J. Am. Chem. Soc. 124, 8078 (2002). https://doi.org/10.1021/ja012505a

3. Th. H. Baum, C. E. Larson, and S. K. Reynolds, US Patent No. US-5096737-A (1992).

4. L. Gao, P. Härter, Ch. Linsmeier, et al., Microelectron. Eng. 82, 296 (2005). https://doi.org/10.1016/j.mee.2005.07.078

5. C. Xu, Th. H. Baum, C. Drive, and A. L. Rheingold, Chem. Mater. 10, 2329 (1998). https://doi.org/10.1021/cm980346x

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1. Thermodynamic Characterization of Phase Transitions of (Hexafluoroacetylacetonato)(cyclooctadiene-1,5)silver;Russian Journal of Physical Chemistry A;2024-09

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