Submicron surface relief fabrication technology for epitaxial GaAs structures with thin AlGaAs stop layers-Reference-Cited by-同舟云学术

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Submicron surface relief fabrication technology for epitaxial GaAs structures with thin AlGaAs stop layers

Published:2011-12 Issue:12 Volume:37 Page:1145-1148
ISSN:1063-7850
Container-title:Technical Physics Letters
language:en
Short-container-title:Tech. Phys. Lett.

Author:

Gladyshev A. G.,Kulagina M. M.,Blokhin S. A.,Krasivichev A. A.,Karachinskii L. Ya.,Vasil’ev A. P.,Maleev N. A.,Ustinov V. M.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/S1063785011120200.pdf

Reference7 articles.

1. A. Pruijmboom, M. Schemmann, J. Hellmig, et al., Proc. SPIE 6908, 690801 (2008).

2. D. K. Serkland, G. M. Peake, K. M. Geib, R. Lutwak, R. M. Garvey, M. Varghese, and M. Mescher, Proc. SPIE 6132, 613208 (2006).

3. C. Jung, R. Jager, M. Grabherr, et al., Electron. Lett. 33, 1790 (1993).

4. A. Haglund, J. S. Gustavsson, J. Vukusic, P. Modh, and A. Larsson, IEEE Photon. Technol. Lett. 16, 368 (2004).

5. P. Debernardi, J. M. Ostermann, M. Feneberg, C. Jalics, and R. Michalzik, IEEE J. Select. Top. Quant. Electron. 11, 107 (2005).

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