Using the RGB data of bright-field optical microscopy to efficiently monitor the surface cleanliness of the active elements of semiconductor wafers in the planar production cycle
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Published:2020-06-01
Issue:6
Volume:87
Page:379
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ISSN:1070-9762
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Container-title:Journal of Optical Technology
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language:en
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Short-container-title:J. Opt. Technol.
Author:
Kozyrev A. A.,Goreeva M. V.,Burtsev D. N.,Eliseeva Yu. A.
Publisher
The Optical Society
Subject
Applied Mathematics,Computational Mathematics,General Engineering,Atomic and Molecular Physics, and Optics