Epitaxial Growth of Zinc Sulfide by Atomic Layer Deposition on SiC/Si Hybrid Substrates
Author:
Publisher
Pleiades Publishing Ltd
Subject
Physics and Astronomy (miscellaneous)
Link
http://link.springer.com/content/pdf/10.1134/S1063785019110026.pdf
Reference8 articles.
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3. H. K. Kaplan, S. K. Akay, and M. Ahmetoglu, Superlatt. Microstruct. 120, 402 (2018). https://doi.org/10.1016/j.spmi.2018.05.055
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