Anisotropy of sapphire single crystal sputtering-Reference-Cited by-同舟云学术

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Anisotropy of sapphire single crystal sputtering

Published:2015-08 Issue:2 Volume:121 Page:222-228
ISSN:1063-7761
Container-title:Journal of Experimental and Theoretical Physics
language:en
Short-container-title:J. Exp. Theor. Phys.

Author:

Minnebaev K. F.,Tolpin K. A.,Yurasova V. E.

Publisher

Pleiades Publishing Ltd

Subject

General Physics and Astronomy

Link

http://link.springer.com/content/pdf/10.1134/S1063776115080129.pdf

Reference43 articles.

1. N. V. Pleshivtsev, Cathode Sputtering (Atomizdat, Moscow, 1968) [in Russian].

2. R. Behrisch and K. Witmaack, Sputtering by Particle Bombardment: III, (Springer-Verlag, Berlin, 1991).

3. V. E. Yurasova, Interaction of Ions with the Surface (PrimaV, Moscow, 1999).

4. R. Behrisch and W. Eckstein, Sputtering by Particle Bombardment: IV, (Springer-Verlag, Berlin, 2007).

5. W. R. Grove, Philos. Mag. 5, 203 (1853).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3);Micromachines;2017-10-07

2. Secondary electron emission and charging characteristics of ion-irradiated sapphire;Vacuum;2016-07

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