Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition
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Published:2014-09
Issue:5
Volume:40
Page:570-577
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ISSN:1087-6596
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Container-title:Glass Physics and Chemistry
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language:en
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Short-container-title:Glass Phys Chem
Author:
Fainer N. I.,Plekhanov A. G.,Rumyantsev Yu. M.,Maximovskii E. A.,Shayapov V. R.,Plekhanov A. G.,Rumyantsev Yu. M.,Maximovskii E. A.,Shayapov V. R.
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites
Reference34 articles.
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