Depth Profiling of Layered Si−O−Al Thin Films with Secondary Ion Mass Spectrometry and Rutherford Backscattering Spectrometry
Author:
Publisher
Pleiades Publishing Ltd
Subject
Surfaces, Coatings and Films
Link
http://link.springer.com/content/pdf/10.1134/S102745101902023X.pdf
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1. Angular Dependences of Silicon Sputtering by Gallium Focused Ion Beam;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2020-07
2. Study of Multilayer Thin Film Structures by Rutherford Backscattering Spectrometry;Technical Physics Letters;2019-06
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