Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700

Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C

Published:2012-05 Issue:3 Volume:6 Page:482-486
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Gusev S. A.,Drozdov M. N.,Kluenkov E. B.,Lopatin A. Ya.,Luchin V. I.,Pariev D. E.,Pestov A. E.,Salashchenko N. N.,Tsybin N. N.,Chkhalo N. I.,Shmaenok L. A.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451012060134.pdf

Reference10 articles.

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2. M. S. Bibishkin, N. I. Chkhalo, S. A. Gusev, et al., Proc. SPIE — Int. Soc. Opt. Eng. 7025, 702502 (2008).

3. N. I. Chkhalo, S. A. Gusev, M. N. Drozdov, et al., Proc. SPIE — Int. Soc. Opt. Eng. 7521, 752105 (2010).

4. S. S. Andreev, M. S. Bibishkin, E. B. Klyuenkov, et al., Izv. Akad. Nauk, Ser. Fiz. 69(2), 207 (2005).

5. E. B. Klyuenkov, A. Ya. Lopatin, V. I. Luchin, et al., in Proceedings of the Workshop on X-Ray Optics 2010 (Chernogolovka, 2010), p. 90.

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