Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry
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Published:2010-12
Issue:13
Volume:65
Page:1370-1376
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ISSN:1061-9348
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Container-title:Journal of Analytical Chemistry
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language:en
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Short-container-title:J Anal Chem
Author:
Tolstoguzov A. B.
Publisher
Pleiades Publishing Ltd
Subject
Analytical Chemistry
Reference21 articles.
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