Thermodynamic simulation of silicon deposition from the gas phase of Si-Cl-H system

Author:

Chernyavsky L. I.,Titov V. A.,Sysoev S. V.,Ryzhenkov S. V.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Metals and Alloys,Inorganic Chemistry,General Chemical Engineering

Reference21 articles.

1. Sho Nakanuma, Silicon Variable Capacitance Diodes with High Voltage Sensitivity by Low Temperature Epitaxial Growth, IEEE Trans. Electron Devices, 1966, vol. ED-13, no. 7, pp. 578–589.

2. Mikhailov, L.N., Estrin, M.Ya., Adonin, A.S. et al., Nekotorye metody nizkotemperaturnoi epitaksii kremniya. Protsessy rosta i sinteza poluprovodnikovykh kristalov i plenok (Some methods of low-temperature epitaxy of silicon. Processes of growth and synthesis of semiconductor crystals and films), Aleksandrov, L.N. and Kuznetsov, F.A., Eds., Novosibirsk: Nauka, 1975, pp. 127–132.

3. Kikuchi, R., Problemy rosta kristalov (problems of crystal growth), Moscow: Mir, 1968, 343 P.

4. Wolf, S. and Tauber, R.W., Silicon Processing for the VLSI Era, vol. 1: Process Technology, 2nd ed., Lattice Press, 2000, 922 P.

5. Sedgwick, T.O., Analysis of the Hydrogen Reduction of Silicon Tetrachloride. Process on the Basis of Quasi-Equilibrium Model, J. Electrochem. Soc., 1964, vol. 111, no. 12, pp. 1381–1383.

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