Thermodynamic analysis of manufacturing polysilicon from SiHCl3, SiCl4 and H2

Author:

Li Peilong,Wang Tiefeng

Publisher

Elsevier BV

Subject

General Chemical Engineering,General Chemistry,Biochemistry,Environmental Engineering

Reference29 articles.

1. Comparison of the energy consumption in different production processes for solar grade silicon;Odden,2008

2. Technical challenges and progress in fluidized bed chemical vapor deposition of polysilicon;Li;Chin. J. Chem. Eng.,2011

3. Trichlorosilane based silicon feedstock for the photovoltaic industry;Weidhaus,2004

4. Manufacture of granular polysilicon from trichlorosilane in a fluidized-bed reactor;Wang;Chem. Eng. Technol.,2012

5. High-temperature reactions in silicon–hydrogen–chlorine system;Sirtl;J. Electrochem. Soc.,1974

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