Relaxing layers of silicon carbide grown on a silicon substrate by magnetron sputtering
Author:
Publisher
Pleiades Publishing Ltd
Subject
Physics and Astronomy (miscellaneous)
Link
http://link.springer.com/content/pdf/10.1134/S106378501401009X.pdf
Reference13 articles.
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3. Y. S. Katharria et al., J. Non-Cryst. Solids 353, 4660 (2007).
4. J. Chen, A. J. Steckl, and M. J. Loboda, J. Vac. Sci. Technol. B 16(3), 1305 (1998).
5. L. K. Orlov et al., Phys. Solid State 49, 627 (2007).
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