Planar Magnetron with Rotary Central Anode Sputtered by an Ion Beam

Author:

Semenov A. P.,Tsyrenov D. B.-D.,Semenova I. A.

Publisher

Pleiades Publishing Ltd

Subject

Instrumentation

Reference13 articles.

1. Semenov, A.P., Semenova, I.A., Tsyrenov, D.B.-D., and Nikolaev, E.O., Instrum. Exp. Tech., 2020, vol. 63, no. 5, pp. 782–786. https://doi.org/10.1134/S0020441220050218

2. Pleshivtsev, N.V. and Semashko, N.N., Itogi Nauki Tekh., Ser.: Fiz. Osn. Lazernoi Puchkovoi Tekhnol., 1989, vol. 5, pp. 55–112.

3. Fundamental'nye i prikladnye aspekty raspyleniya tverdykh tel (Fundamental and Applied Aspects for Sputtering of Solids), Mashkova, E.S., Ed., Moscow: Mir, 1989.

4. Sputtering by Particle Bombardment I. Physical Sputtering of Single-Element Solids, Behrisch, R., Ed., Berlin, Heidelberg: Springer, 1981.

5. Pletnev, V.V., Itogi Nauki Tekh., Ser.: Puchki Zaryazhennykh Chastits Tverd. Telo, 1991, vol. 5, p. 4.

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1. Gas Discharge Device Based on a Planar Magnetron and a Plasma Ion Source;Bulletin of the Russian Academy of Sciences: Physics;2023-12

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