Author:
Feklisova O. V.,Tereshchenko A. N.,Steinman E. A.,Yakimov E. B.
Subject
Surfaces, Coatings and Films
Reference10 articles.
1. R. Falster, Gettering in Silicon: Fundamentals and Recent Advances: Semiconductor Fabtech 13th Ed. (ICG Publ., London, 2001), p. 187.
2. M. V. Mezhennyi, M. G. Milvidskii, V. Ya. Reznik, and R. J. Falster, Phys. Status. Solidi C 6, 1968 (2005).
3. C. Donolato, Semicond. Sci. Technol. 7, 37 (1992).
4. D. Cavalcoli, A. Cavallini, and E. Gombia, Phys. Rev. B 56(16), 10208 (1997).
5. S. V. Koveshnikov, O. V. Feklisova, E. B. Yakimov, and N. A. Yarykin, Phys. Status Solidi A 127, 67 (1991).
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献