Analysis of TiAlSiN coatings deposited by reactive magnetron sputtering under high-current ion assistance

Author:

Gavrilov N. V.,Kamenetskikh A. S.,Chukin A. V.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Reference21 articles.

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4. D. Levchu., Surf. Coat. Technol. 201, 6071 (2007).

5. B. Window and N. Savvide., J. Vac. Sci. Technol. 4 (3), 453 (1986).

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1. Influence of the Addition of the Elements Ti and Cr on the Structure, and Mechanical and Tribological Properties of AlSiN Coatings;Journal of Nano Research;2022-05-10

2. Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2021-01

3. Studying the microstructure of Ti-Al-Si-N coating using Kβ x-ray;PHYSICS, TECHNOLOGIES AND INNOVATION (PTI-2019): Proceedings of the VI International Young Researchers’ Conference;2019

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