Optical Properties of Aluminum- and Silicon-Nitride Films and Al–Si–N Nanocomposite Coatings Deposited by Reactive Magnetron Sputtering
Author:
Publisher
Pleiades Publishing Ltd
Subject
Surfaces, Coatings and Films
Link
https://link.springer.com/content/pdf/10.1134/S1027451021010274.pdf
Reference28 articles.
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1. Optical Properties of Al–Si–N Coatings Deposited by Reactive Magnetron Sputtering on Steel 12H18N10T and Zirconium Alloy E110;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12
2. Effect of the Content of Silicon on the Optical Properties of Al–Si–N Coatings Irradiated with Carbon Ions in the Short-Pulse Implantation Mode;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2022-10
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