Calibration of a scanning electron microscope from two coordinates-Reference-Cited by-同舟云学术

Calibration of a scanning electron microscope from two coordinates

Published:2017-07 Issue:4 Volume:11 Page:890-896
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Novikov Yu. A.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

Reference17 articles.

1. International Technology Roadmap for Semiconductors, 2013 Edition, Metrology (2013).

3. V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 7405, 740504-1–74050-8 (2009).

4. V. Gavrilenko, Yu. Novikov, A. Rakov, and P. Todua, Nanoindustriya, No. 4, 36–42 (2009).

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