Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography-Reference-Cited by-同舟云学术

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Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography

Published:2023-06 Issue:3 Volume:17 Page:652-655
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Surf. Investig.

Author:

Nazmov V. P.,Varand A. V.,Mikhailenko M. A.,Goldenberg B. G.,Prosanov I. Yu.,Gerasimov K. B.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

https://link.springer.com/content/pdf/10.1134/S102745102303028X.pdf

Reference21 articles.

1. I. Haller, M. Hatzakis, and R. Srinivasan, IBM J. Res. Dev. 12, 251 (1968). https://doi.org/10.1147/rd.123.0251

2. D. L. Spears and H. I. Smith, Electron. Lett. 8, 102 (1972). https://doi.org/10.1049/el:19720074

3. Y. Vladimirsky, O. Vladimirsky, and K. J. Morris, M. J. Klopf, G. M. Calderon, and V. Saile, Microelectron. Eng. 30, 543 (1996). https://doi.org/10.1016/0167-9317(95)00305-3

4. J. S. Greeneich, J. Electrochem. Soc. 122, 970 (1975).

5. Charlesby, A., Atomic Radiation and Polymers (Pergamon, Oxford, 1960).

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