High-resolution pattern replication using soft X rays-Reference-Cited by-同舟云学术

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High-resolution pattern replication using soft X rays

Published:1972 Issue:4 Volume:8 Page:102
ISSN:0013-5194
Container-title:Electronics Letters
language:en
Short-container-title:Electron. Lett.

Author:

Spears D.L.,Smith Henry I.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Link

https://digital-library.theiet.org/content/journals/10.1049/el_19720074?crawler=true&mimetype=application/pdf

Reference11 articles.

1. Cosslett, V.E., Engstrom, A., Pattee, H.H., X-ray microscopy and microradiography, (Academic Press 1957)

2. Cosslett, V.E., and Nixon, W.C.: X-ray microscopy, (Cambridge University Press 1960)

3. Heinrich, K.F.J.: ‘X-ray absorption uncertainty’, McKinley, T.D., Heinrich, K.F.J., Wittry, D.B., The electron microprobe, (Wiley 1966), p. 296–377

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