Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects-Reference-Cited by-同舟云学术

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Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects

Published:2019-07 Issue:4 Volume:13 Page:594-599
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Kazmiruk V. V.,Kurganov I. G.,Podkopaev A. A.,Savitskaya T. N.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451019040074.pdf

Reference20 articles.

1. V. V. Kaz’miruk and T. N. Savitskaya, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech., 3, 781 (2009).

2. B. Bunday and U. Kramer, Proc. of SPIE 2009 (ISMI, Qimonda GmbH, Dresden, 2009), vol. 7272, p. 727204.

3. V. V. Kazmiruk and M. Yu. Barabanenkov, ECS Transactions 23 (1), 43 (2009).

4. M. Yu. Barabanenkov, V. V. Kaz’miruk, and I. G. Kurganov, Abstr. Russ. Conf. Electron Microscopy (Chernogolovka, 2012), p. 172.

5. V. V. Kazmiruk and T. N. Savitskaja, http://xxx.lanl.gov/abs/0805.0248

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