Calculation of the flow of sputtered atoms returning to a target with a surface relief during sputtering in glow discharge-Reference-Cited by-同舟云学术

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Calculation of the flow of sputtered atoms returning to a target with a surface relief during sputtering in glow discharge

Published:2008-04 Issue:2 Volume:2 Page:203-206
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Kristya V. I.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451008020080.pdf

Reference14 articles.

1. J. A. Valles-Abarca and A. Gras-Marti, J. Appl. Phys. 55(5), 1370 (1984).

2. A. G. Zhiglinskii, V. V. Kuchinskii, and E. G. Sheikin, Zh. Tekh. Fiz. 56(9), 1718 (1986) [Tech. Phys. 31, 1022 (1986)].

3. A. Bogaerts, M. van Straaten, and R. Gijbels, J. Appl. Phys. 77(5), 1868 (1995).

4. P. K. Petrov, V. A. Volpyas, and R. A. Chakalov, Vacuum 52(4), 427 (1999).

5. L. B. Begrambekov, A. M. Zakharov, A. A. Pustobaev, and V. G. Tel’kovskii, Fiz. Khim. Obrab. Mater., No. 5, 26 (1989).

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Calculation of the ion current distribution along the cathode in glow discharge under the existence of a periodic relief and an insulating film of varying thickness on its surface;IOP Conference Series: Materials Science and Engineering;2017-01

2. Change in the optical properties of borosilicate glass under atom bombardment at grazing incidence angles;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-11

3. Impact of an ion-flux non-uniformity on the sputtering of a target with a surface relief in a glow discharge plasma;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2013-03

4. Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-07

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