Description of the thermalization process of the sputtered atoms in a glow discharge using a three‐dimensional Monte Carlo method
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358887
Reference13 articles.
1. Self-consistent model of a direct-current glow discharge: Treatment of fast electrons
2. A Monte Carlo analysis of an electron swarm in a nonuniform field: the cathode region of a glow discharge in helium
3. Slowing down and thermalization of sputtered particle fluxes: Energy distributions
4. Evolution towards thermalization, and diffusion, of sputtered particle fluxes: Spatial profiles
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