Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences-Reference-Cited by-同舟云学术

Comparative characteristics of optical methods for measuring the surface shape at the institute for physics of microstructures, Russian Academy of Sciences

Published:2015-07 Issue:4 Volume:9 Page:741-744
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Akhsakhalyan A. A.,Akhsakhalyan A. D.,Volgunov D. G.,Zorina M. V.,Toropov M. N.,Chkhalo N. I.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451015040035.pdf

Reference8 articles.

1. M. M. Barysheva, A. E. Pestov, N. N. Salashchenko, M. N. Toropov, and N. I. Chkhalo, Phys. Usp. 55, 681 (2012).

2. N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, and M. N. Toropov, in Lithography, Ed. by M. Wang (Intech, 2010), p. 44.

3. A. A. Akhsakhalyan, A. D. Akhsakhalyan, Yu. A. Vainer, D. G. Volgunov, M. V. Zorina, E. B. Klyuenkov, M. I. Kuznetsov, N. N. Salashchenko, and A. I. Kharitonov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 6, 487 (2012).

4. A. A. Akhsakhalyan, A. D. Akhsakhalyan, Yu. A. Vainer, D. G. Volgunov, M. V. Zorina, E. B. Klyuenkov, A. I. Kas’kov, M. I. Kuznetsov, I. M. Nefedov, N. N. Salashchenko, and A. I. Kharitonov, Bull. Russ. Acad. Sci.: Phys. 76, 168 (2012).

5. N. N. Salashchenko, M. N. Toropov, and N. I. Chkhalo, Bull. Russ. Acad. Sci.: Phys. 74, 53 (2010).

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