1. I. Yamada, J. Matsuo, Z. Insepov, et al., Nucl. Instrum. Methods Phys. Res. B 164–165, 944 (2000).
2. I. Yamada, J. Matsuo, Z. Insepov, et al., J. Vac. Sci. Technol. A 14, 781 (1996).
3. ToF-SIMS: Surface Analysis by Mass Spectrometry, Ed. by J. C. Vickerman and D. Briggs (IM Publ., Chichester, UK, 2001).
4. M. A. Foad, R. Webb, R. Smith, et al., J. Vac. Sci. Technol. B 18, 445 (2000).
5. J. A. Davis, Ion Implantation and Beam Technology, Ed. by J. S. Williams and J. M. Pout (Naukova Dumka, Kiev, 1988), p. 72 [in Russian].