Simulation of doping and primary radiation damage to the SiC(111) surface under bombardment by Si N atomic and cluster ions (N = 1, 5, and 60) using classical molecular dynamics
Author:
Publisher
Pleiades Publishing Ltd
Subject
Surfaces, Coatings and Films
Link
http://link.springer.com/content/pdf/10.1134/S1027451011030050.pdf
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