A compact vapor source of conductive target material sputtered by 3-keV ions at 0.05-Pa pressure

Author:

Grigoriev S. N.,Melnik Yu. A.,Metel A. S.,Panin V. V.,Prudnikov V. V.

Publisher

Pleiades Publishing Ltd

Subject

Instrumentation

Reference11 articles.

1. Aksenov, I.I., Vakula, S.I., Padalka, V.G., et al., Sov. Phys.-Tech. Phys., 1980, vol. 25, no. 9, p. 1164.

2. Rossnagel, S.M., IEEE Trans. Plasma Sci., 1990, vol. 18, no. 6, p. 878.

3. McDaniel, E.W., Collision Phenomena in Ionized Gases, New York-London-Sydney: Wiley, Inc., 1964.

4. Metel, A.S. and Grigoriev S.N., Glow Discharge with Electrostatic Confinement of Electrons: Physics, Engineering, Applications, Moscow: Yanus-K, 2005 [in Russian].

5. Grigoriev, S.N., Melnik, Yu.A., and Metel, A.S., Proc. 7 International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk: Proceedings, 2004, p. 29.

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