1. Department of High-Efficiency Machining Technologies, Moscow State University of Technology “STANKIN”, Vadkovsky Lane 3a, 127055 Moscow, Russia
2. Institute of Design and Technological Informatics of the Russian Academy of Sciences (IDTI RAS), Vadkovsky Lane 18a, 127055 Moscow, Russia
3. Department of Solid State Physics and Nanotechnology, Belarusian State University, Nezavisimosti Ave. 4, 220030 Minsk, Belarus