Broad beam source of fast atoms produced as a result of charge exchange collisions of ions accelerated between two plasmas

Author:

Grigoriev S. N.,Melnik Yu. A.,Metel A. S.,Panin V. V.

Publisher

Pleiades Publishing Ltd

Subject

Instrumentation

Reference9 articles.

1. Pinegin, S.V., Orlov, A.V., and Tabachnikov, Yu.B., High-Precision Bearings and Gas-Lubricated Bearing Systems, Moscow: Mashinostroyeniye, 1984.

2. Grigorov, A.I. and Semenov, A.P., Processing of Gas Bearings using the Ion Sputtering, Moscow: Nauka, 1976.

3. Hayes, A.V., Kanarov, V., and Vidinsky, B., Rev. Sci. Instrum., 1996, vol. 67, no. 4, p. 1638.

4. Metel, A.S. and Grigoriev, S.N., US Patent 6 285 025, Int. Cl. H01S 1/00; H01S 3/00, 2001.

5. Grigoriev, S., Melnik, Yu., and Metel, A., Surf. Coat. Technol., 2002, vol. 156, no. 1/3, p. 44.

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