Author:
Dzhuplin V. N.,Klimin V. S.,Morozova Yu. V.,Rezvan A. A.,Vakulov Z. E.,Ageev O. A.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Mbam, S.O., Nwonu, S.E., Orelaja, O.A., Nwigwe, U.S., and Gou, X.F., Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: A critical review, Mater. Res. Express, 2019, vol. 6, no. 12.
2. Nanotekhnologii v mikroelektronike (Nanotechnology in Microelectronics), Ageev, O.A. and Konoplev, B.G., Eds., Moscow: Nauka, 2019.
3. Klimin, V.S., Rezvan, A.A., and Morozova, J.V., Critical pressure during the formation of carbon nanotubes by the method of plasma chemical vapor deposition, J. Phys.: Conf. Ser., 2019, vol. 1410, no. 1, p. 012035. https://doi.org/10.1088/1742-6596/1410/1/012035
4. Klimin, V.S., Rezvan, A.A., and Morozova, J.V., Formation of catalytic centers for the growth of carbon nanostructures for nanophotonics devices, J. Phys.: Conf. Ser., 2019, vol. 1410, no. 1, p. 012164. https://doi.org/10.1088/1742-6596/1410/1/012164
5. Morozova J.V. Klimin, V.S., and Rezvan, A.A., Application of carbon nanoscale materials in instrument structures sensitive to the gas atmosphere, J. Phys.: Conf. Ser., 2020, vol. 1695, no. 1, p. 012027.
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